University of Pennsylvania - ESE 529ESE529_Spring2020_lecture07_dynamics_distributed

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ESE 529 Introduction to MEMS and NEMS Lecture 7 Troy Olsson Assistant Professor Department of Electrical and Systems Engineering [email protected] Lecture Overview • Last Time • We ... learned about the frequency response and 3dB bandwidth of MEMS devices • We learned about Q factor • We learned the sources of damping in MEMS devices • We studied devices that benefit from high-Q and devices where high-Q is undesirable • We introduced Laplace transforms of mechanical/electrical elements and forces/voltages as a method to solve for the transient response of MEMS devices • Today • We will use Laplace transforms to solve for the time domain response of the accelerometer we studied in lecture 3, to a stepped force input without and with initial conditions • We will study distributed mechanical structures where springs are not massless • We will introduce the concept of equivalent mass • The equations for the resonant frequency of many common MEMS devices will be presented3 Laplace transform of passive circuit elements [Show More]

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