University of Pennsylvania - ESE 529ESE529_Spring2020_lecture01_intro.

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ESE 529 Introduction to MEMS and NEMS Lecture 1 Troy Olsson Assistant Professor Department of Electrical and Systems Engineering [email protected] What will we do in this course? • Und... erstand what are MEMS • Why MEMS are scientifically and commercially interesting • How small electromechanical structures differ from their macro-scale counterparts • Learn the fundamental principals needed to understand and realize MEMS • Electrical and mechanical behavior of MEMS structures and devices • Electromechanical transducers and transduction mechanisms • Inter-domain energy and power exchange • Equivalent circuit modeling and analysis • MEMS materials and microfabrication techniques • MEMS electronic interface circuits • Study different classes of MEMS • Sensors: acceleration, rotation, pressure, sound, magnetic, infrared • Actuators: RF switches, mirrors • Processors: RF filters • Other: biomedical, microfluidic • Learn to combine MEMS fundamentals to realize state-of-the-art MEMS devices [Show More]

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